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Class IT 2024
Class Basic
Parker Veriflo regulators are designed for precise pressure control in ultra-high purity (UHP) and specialty gas systems. Engineered for stability, cleanliness, and repeatability, they ensure accurate delivery of process gases in critical applications such as semiconductor manufacturing, analytical instrumentation, and high-tech R&D environments.
To reduce and control inlet gas pressure to a stable, desired outlet pressure for ultra- high purity and specialty gas applications.
Semiconductor manufacturing, analytical instrumentation, R&D laboratories, and high purity chemical processing.
Single-stage regulators reduce pressure in one step, ideal for applications with stable inlet pressure. Dual-stage regulators reduce pressure in two steps, maintaining a more constant outlet pressure despite inlet fluctuations.
A pressure regulator controls downstream pressure, while a back pressure regulator maintains a set upstream pressure by releasing excess gas.
Commonly stainless steel (316L, electropolished), with options in fluoropolymer (PTFE/PFA) for corrosive gas service.
They are designed for helium leak rates as low as 1x10⁻⁹ scc/sec for metal regulators, ensuring zero cross-contamination risk.
Standard VCR®, face seal (C-seal, W-seal), compression fittings, and surface mount configurations.
From low-flow applications (a few sccm) to high-flow bulk gas systems exceeding 500 slpm, depending on series.
Typical finishes are 10 μin Ra electropolished stainless steel; some models offer ≤ 5 μin Ra for advanced node applications
To reduce and control inlet gas pressure to a stable, desired outlet pressure for ultra- high purity and specialty gas applications.
Instructor
Turboserv Engineering
No. 10, PKM Road, Athipet
Chennai – 600 058. India
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